TCT Protocol

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docs/post-ASML_era/TCT_Protocol.md

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Why This Alias Exists#

During the initial documentation architecture, the Temporal Contrast Test protocol was anticipated to reside under docs/metrology/ alongside other metrology standards. The document was subsequently placed in docs/post-ASML_era/ as part of the core post-ASML era canon, because TCT results drive SC class assignment and feed directly into fab qualification gates that span beyond metrology scope.

The alias docs/metrology/TCT_Protocol.md is retained as a stable redirect for tools and external references that predate the canonical path assignment.

Canonical Document Summary#

The TCT Protocol (docs/post-ASML_era/TCT_Protocol.md) is the normative protocol for the Temporal Contrast Test. It defines:

• Physical basis of temporal contrast as a measurable quantity
• TAIS/ARS/CEC instrument system requirements and configuration
• Test coupon specification and handling
• FSCP (Full-Surface Coherence Probe) address pattern with spacings S1–S7
• Complete test sequence with step-level normative requirements
• AER (Anomalous Event Rate) computation including time-since-injection correction
• Contrast curve fitting using logistic sigmoid parameterization
• SC Rating derivation at reference interval Δτ_ref = 1/256
• SC class assignment from SC Rating (thresholds: SC-I >0.92, SC-II 0.75–0.92, SC-III <0.75)
• Spatial uniformity analysis using 5×5 subregion decomposition
• Calibration chain: RLSS → FTRC → session calibration
• Measurement uncertainty budget
• TCT Report format and required fields
• Integration with downstream protocols (TRS Qualification, PDK certification)

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