Temporal Layer Markup Format Schema

About This Document#

This document is a planned stub. It has been registered in the TriadicFrameworks documentation graph and is referenced by two canonical post-ASML era documents. It is a P2 priority deliverable, required for PDK generation toolchains and model validation workflows.

Purpose#

The Temporal Layer Markup Format (TLMF) Schema defines the file format used to encode SC Class Layer Maps (SCLM) within a TRS-Aware PDK deliverable. TLMF files carry spatially resolved SC class annotations, regime boundary positions, RWDL contours, and SC_eff scalar fields across the substrate plane. They are the primary data interchange format between fab metrology outputs (SC_eff maps from TGI Metrology) and EDA layer assignment toolchains.

Citing Documents#

Expected Content#

When authored, this document is expected to cover:

1. Format Overview — TLMF design goals; relationship to GDS/OASIS layer systems; TLMF as an overlay format annotating spatial coordinates with temporal properties.
2. File Structure
   • tlmf_header — Format version, process node, fab ID, SCR zone config ID, generation timestamp, originating tool
   • tlmf_substrate — Substrate geometry (die extent, coordinate origin, units)
   • tlmf_layers — Array of named temporal layers, each containing:
     • layer_id — Unique layer identifier within the PDK
     • sc_class_map — Rasterized or polygon-decomposed SC class assignment (SC-I / SC-II / SC-III) per region
     • sc_eff_field — Optional continuous SC_eff scalar field (floating point grid or contour list)
     • rwdl_contours — RWDL boundary polylines in substrate coordinates
     • clg_field — Optional Coherence Length Gradient field
     • regime_boundaries — CCR/CPR/TR regime boundary polygons (from MRSM validation data, where available)
   • tlmf_metadata — Measurement provenance (TCT-DEF session IDs, TGI Metrology run IDs, MRSM model version)
3. Coordinate System — Origin convention; units (nm or μm); handedness; relationship to die corner marking.
4. SC Class Encoding — Integer codes for SC class values in raster maps; polygon winding rules for vector encoding.
5. Scalar Field Encoding — Grid resolution requirements; interpolation method specification; NaN handling for out-of-bounds regions.
6. TLMF Schema — Formal schema definition (JSON Schema or XML Schema); standalone schema file location in docs/data-formats/schemas/.
7. TLMF Version Field — Format version field; version lock to PDK version; backward compatibility policy.
8. Conformance — Minimum required layers for a conforming TLMF file; optional extended layers; producer/consumer conformance separately stated.
9. Toolchain Integration — How EDA tools load TLMF for layer assignment; how PDK generation scripts produce TLMF from metrology inputs; reference toolchain scripts.
10. Example File — Annotated example TLMF for a two-zone substrate with SC-I core and SC-II periphery.

Dependencies#

When authored, this document is expected to reference:

• docs/post-ASML_era/The_TRS-Aware_PDK_Specification.md — Primary consumer; SCLM component definition
• docs/post-ASML_era/The_TGI_Metrology_Standard.md — Source of SC_eff and RWDL maps that populate TLMF fields
• docs/data-formats/TCT_DEF_Schema.md — TCT-DEF SC rating data used in TLMF SC class map generation
• docs/materials/SC_Classification.md — SC class boundary definitions encoded in TLMF layer values
• docs/fab/SCR_Zone_Config.md — Zone topology that defines TLMF zone partitioning

Authoring Notes#

• Field names in TLMF layer records MUST be consistent with field names in the PDK SCLM deliverable as defined in The_TRS-Aware_PDK_Specification.md.
• The SC_eff scalar field resolution MUST be specified as a function of the minimum design rule pitch for the target SC class.
• Raster and vector encoding paths MUST both be defined; tools may support either or both.
• TLMF version number MUST be embedded in the PDK version string per the {process_node}_{fab_id}_{scr_zone_config}_{major}.{minor}.{patch}[P] format.

Related Documents#

This stub was scaffolded from the TriadicFrameworks post-ASML era documentation suite. See docs/post-ASML_era/README.md for the full document graph.