TCT Protocol
Redirect Notice#
This path is a registered alias. The content you are looking for has been published at its canonical location:
docs/post-ASML_era/TCT_Protocol.md
This file exists to preserve inbound links from tools, scripts, and documentation that reference the metrology-scoped path docs/metrology/TCT_Protocol.md. No content is maintained here.
Why This Alias Exists#
During the initial documentation architecture, the Temporal Contrast Test protocol was anticipated to reside under docs/metrology/ alongside other metrology standards. The document was subsequently placed in docs/post-ASML_era/ as part of the core post-ASML era canon, because TCT results drive SC class assignment and feed directly into fab qualification gates that span beyond metrology scope.
The alias docs/metrology/TCT_Protocol.md is retained as a stable redirect for tools and external references that predate the canonical path assignment.
Canonical Document Summary#
The TCT Protocol (docs/post-ASML_era/TCT_Protocol.md) is the normative protocol for the Temporal Contrast Test. It defines:
- Physical basis of temporal contrast as a measurable quantity
- TAIS/ARS/CEC instrument system requirements and configuration
- Test coupon specification and handling
- FSCP (Full-Surface Coherence Probe) address pattern with spacings S1–S7
- Complete test sequence with step-level normative requirements
- AER (Anomalous Event Rate) computation including time-since-injection correction
- Contrast curve fitting using logistic sigmoid parameterization
- SC Rating derivation at reference interval Δτ_ref = 1/256
- SC class assignment from SC Rating (thresholds: SC-I >0.92, SC-II 0.75–0.92, SC-III <0.75)
- Spatial uniformity analysis using 5×5 subregion decomposition
- Calibration chain: RLSS → FTRC → session calibration
- Measurement uncertainty budget
- TCT Report format and required fields
- Integration with downstream protocols (TRS Qualification, PDK certification)
Navigation#
| Canonical document | docs/post-ASML_era/TCT_Protocol.md |
| SC class authority | docs/materials/SC_Classification.md |
| Metrology standard | docs/post-ASML_era/The_TGI_Metrology_Standard.md |
| Data exchange format | docs/data-formats/TCT_DEF_Schema.md |
| Module index | docs/post-ASML_era/README.md |
| Module metadata | docs/post-ASML_era/module.json |
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