TCT Data Exchange Format Schema

About This Document#

This document is a planned stub. It has been registered in the TriadicFrameworks documentation graph and is referenced by three canonical post-ASML era documents. It is a P2 priority deliverable, required for toolchain interoperability between TCT instruments and downstream process control systems.

Purpose#

The TCT Data Exchange Format (TCT-DEF) Schema defines the machine-readable format used to transfer TCT Report data between metrology instruments (TAIS/ARS/CEC instrument system) and downstream consumers including process control systems, PDK certification toolchains, and the TRS Stack Qualification workflow. Conforming implementations allow automated ingestion of TCT results without manual re-entry or format negotiation.

Citing Documents#

Expected Content#

When authored, this document is expected to cover:

1. Format Overview — TCT-DEF design goals; relationship to TCT Report sections defined in TCT_Protocol.md; encoding choices (JSON-Lines recommended for streaming; JSON schema for validation).
2. Top-Level Record Structure
   • tcr_header — Session metadata (instrument IDs, calibration references, timestamp, operator ID, lot/wafer identifiers)
   • tcr_coupon — Test coupon specification fields (SC class min, coupon geometry, layer stack ID)
   • tcr_measurements — Array of per-address-point AER measurement records
   • tcr_contrast_curve — Fitted logistic sigmoid parameters (L, k, Δτ₀, offset); goodness-of-fit metrics
   • tcr_sc_rating — SC value at Δτ_ref=1/256; SC class assignment; assignment authority ID
   • tcr_uniformity — 5×5 subregion spatial uniformity data; uniformity metric; pass/fail flag
   • tcr_uncertainty — Combined measurement uncertainty budget; expanded uncertainty U(SC) at k=2
   • tcr_provenance — Calibration chain references (RLSS ID, FTRC ID, session calibration timestamp)
3. Field Definitions — Per-field normative definitions including data type, units, allowed values, and required/optional status.
4. FSCP Address Encoding — Representation of the S1–S7 spacing grid in the measurement records; coordinate system definition.
5. JSON Schema — Formal JSON Schema (Draft 07 or later) for validating conforming TCT-DEF records.
6. Version Field — tcr_version field definition; backward compatibility policy.
7. Conformance Levels — Minimum required fields for basic conformance; extended fields for full conformance; producer and consumer conformance separately specified.
8. Example Records — Annotated example of a complete TCT-DEF record for an SC-I substrate and an SC-II substrate.

Dependencies#

When authored, this document is expected to reference:

• docs/post-ASML_era/TCT_Protocol.md — Normative source for all measured quantities and TCT Report fields that map into this schema
• docs/materials/SC_Classification.md — SC class assignment rules that govern the tcr_sc_rating.sc_class field values

Authoring Notes#

• Field names MUST match the TCT Report section names defined in TCT_Protocol.md exactly (or be explicitly mapped with a translation table if names differ).
• The JSON Schema MUST be provided as a standalone file in the docs/data-formats/schemas/ subdirectory and referenced from this document.
• Numeric fields carrying SC values MUST use IEEE 754 double precision; AER fields MUST use integer counts with a separate exposure-time field to avoid floating-point accumulation errors.

Related Documents#

This stub was scaffolded from the TriadicFrameworks post-ASML era documentation suite. See docs/post-ASML_era/README.md for the full document graph.