Post-ASML PDK Integration

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docs/post-ASML_era/The_TRS-Aware_PDK_Specification.md

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Why This Alias Exists#

During the initial documentation architecture, PDK integration content was anticipated to reside under docs/eda/. The full specification was subsequently placed in docs/post-ASML_era/ with the rest of the core post-ASML era canon, as it encompasses fab-side, materials, and metrology concerns beyond EDA scope alone.

The alias docs/eda/PostASML_PDK_Integration.md is retained as a stable redirect for tools and external references that predate the canonical path assignment.

Canonical Document Summary#

The TRS-Aware PDK Specification (docs/post-ASML_era/The_TRS-Aware_PDK_Specification.md) is the normative specification for process design kits in TRS-aware fabs. It defines:

• Five PDK component categories: SCLM, TSPS, TDR, CBT, TTFAL
• SC Class Layer Maps in TLMF format
• TRS Stack Parameter Sets
• Temporal Design Rules (six rule classes: ASR, DGR, TPR, CGR, CSR, TCRS)
• Coherence Budget Tables
• TTF Arc Library (five arc types: CSA, ZBA, APA, TCA, DDA)
• RWDL/SC_eff map integration
• Deliverable directory structure and generation workflow
• EDA tool integration requirements and certification
• PDK qualification test suite
• Versioning and change control (format: {process_node}_{fab_id}_{scr_zone_config}_{major}.{minor}.{patch}[P])

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